The VAC 870™ Compartment Coater is technologically the most advanced, cost effective and flexible coating system available in the industry today. VACUUM COATING Technologies combined unique design features with the well-established modular philosophy and then integrated state-of-the-art components thus creating a new standard for coating equipment.

The VAC 870 Compartment Coater is the only system in the industry designed to use turbo or diffusion pumps or a combination of both - it is the customer’s choice.    Compartments are identical in size to allow for re-configuration of process and pumping compartments or to change into a spare compartment with relative ease.

System Design:

  • Process chambers are designed with 6 universal compartments each.  All internals (pumping tunnels or source environments) are identical and interchangeable
  • Available with turbo pumps, diffusion pump or combination of both
  • Universal sputter source bodies provides flexibility in switching between C-MAG® rotatable and planar magnetrons


System Features:

  • Customer’s choice; highly efficient turbo pump or low-cost, low maintenance diffusion pump or a combination of both     
  • Allows easy system reconfiguration of sources and pumping compartments to adjust to market demand and changing production mix
  • All source bay assemblies and source bodies are identical and fully interchangeable therefore can be equipped with any combination of planar or C-MAG® rotatable magnetrons or left blank   
  •  Designed to use the VACT one-piece drop-in design advance maintenance tools.  Please refer to Maintenance Tools


Interchangeable Universal Sputter Sources and Advance Maintenance Tools allows for fast and efficient maintenance turnarounds. The flexibility features of the VAC 870 Compartment Coating System provides customers with options and capabilities to adapt to new, different or changing requirements now and in the future. As with all VACUUM COATING Technologies systems, this system's design is easily upgradeable to meet the future challenges in capacity, speed and technology.