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The Modular Coating System is an in-line production system for large area sputter coating. Since its introduction in the early 90s, the Modular Coater has become the world’s leading platform for the production of single and double low-e coatings.
System Design:
- Process chambers are available in either two or three source bays
- Diffusion-pump base system for its low cost and low maintenance
- Each chamber designed with its own vacuum pumped isolation zones
System Features:
- All source bay assemblies are identical and fully interchangeable therefore can be equipped with any combination of planar or C-MAG® rotatable magnetrons or left blank
- All source bays have identical process conditions
- Tunnels and pumping are re-configurable
- Direct pumping in the process zone decreases pressure fluctuations from glass moving through the tunnels
- Utilize feedthrough for water-cooling to eliminate water to vacuum connections
- Designed to use the VACT one-piece drop-in advance maintenance tools
Through design enhancements integrated with advance technology, today’s Modular Coater is a highly efficient, low maintenance, reliable system. It is recognized and trusted by well-established glass producers around the world.
This production platform is widely used in the architectural glass industry and the automotive industry and has many other optical applications.
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